应用化学 ›› 2021, Vol. 38 ›› Issue (9): 1105-1118.DOI: 10.19894/j.issn.1000-0518.210264

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193 nm化学放大光刻胶研究进展

李小欧1, 顾雪松1, 刘亚栋1,2*, 季生象1,2*   

  1. 1中科院长春应化所黄埔先进材料研究院,广州 510530
    2中国科学院长春应用化学研究所,生态环境高分子材料重点实验室,长春 130022
  • 收稿日期:2021-06-01 接受日期:2021-07-06 出版日期:2021-09-01 发布日期:2021-09-06
  • 通讯作者: *E-mail:ydliu26@ciac.ac.cn; sji@ciac.ac.cn
  • 基金资助:
    国家自然科学基金(No.51973212)、吉林省科技发展计划中青年科技创新领军人才及团队项目(No.20200301017RQ)资助

Research Progress on Chemically Amplified 193 nm Photoresists

LI Xiao-Ou1, GU Xue-Song1, LIU Ya-Dong1,2*, JI Sheng-Xiang1,2*   

  1. 1Huangpu Institute of Advanced Materials,Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Guangzhou 510530, China
    2Key Laboratory of Polymer Ecomaterials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
  • Received:2021-06-01 Accepted:2021-07-06 Online:2021-09-01 Published:2021-09-06
  • Supported by:
    National Natural Science Foundation of China (No.51973212) and the Department of Science and Technology of Jilin Province (No.20200301017RQ)

摘要: 193 nm光刻胶主要有化学/非化学放大、分子玻璃和无机-有机杂化等类型。 目前,商业化193 nm光刻胶基本为化学放大型,主要成分包括聚合物树脂、光致产酸剂、添加剂(碱性添加剂、溶解抑制剂等)和溶剂等。 本文从光刻胶的成分出发介绍193 nm化学放大胶的研究进展,概述目前应用及研究中出现的代表性193 nm化学放大胶,总结其优缺点及未来可能的发展方向。

关键词: 化学放大胶, 聚合物树脂, 光致产酸剂, 碱性添加剂, 溶解抑制剂

Abstract: There are several platforms for 193 nm photoresists, including chemically/non-chemically amplified photoresists, molecular glass and inorganic-organic hybrid systems. This review mainly focueses on chemically amplified photoresists due to their predominante role in industrial applications. The main components of the 193 nm chemically amplified photoresist include polymer resins, photoacid generators, additives (alkaline additives, dissolution inhibitors, etc.) and solvents. We review the current status of representative 193 nm photoresists and their main components and their advantages, disadvantages and possible development directions are also discussed.

Key words: Chemically amplified photoresist, Polymer resin, Photoacid generator, Alkaline additive, Dissolution inhibitor

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