中华医学超声杂志

应用化学 ›› 1997, Vol. 0 ›› Issue (6): 42-44.

• 研究论文 • 上一篇    下一篇

Al2O3透明陶瓷薄膜的制备与结构研究

苏春辉1, 端木庆铎1, 王艳1, 隋智通2   

  1. 1. 长春光学精密机械学院材料系, 长春 130022;
    2. 东北大学冶金学院, 沈阳
  • 收稿日期:1997-03-25 修回日期:1997-09-01 出版日期:1997-12-10 发布日期:1997-12-10
  • 基金资助:
    国家自然科学基金

Preparation of Transparent Alumina Ceramic Film and Its Structure

Su Chunhui1, Duanmu Qingduo1, Wang Yan1, Sui Zhitong2   

  1. 1. Department of Material Engineering, Changchun College of Optics and Fine Mechanics, Changchun 130022;
    2. College of Metallurgy, Northeast University, Shenyang
  • Received:1997-03-25 Revised:1997-09-01 Published:1997-12-10 Online:1997-12-10

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摘要： Al2O3 薄膜可作为绝缘材料应用于集成电路多层基板, 研究十分活跃[1～4]. 本文采用溶胶-凝胶法制取Al2O3透明陶瓷薄膜, 并用XRD、XPS及IR等研究了氧化铝凝胶在不同热处理条件下的晶型、Al3+的配位状态、氧的存在形式及结构变化规律。

关键词: Al2O3, 透明陶瓷, 薄膜, 制备, 结构

Abstract: Transparent ceramic film has been prepared by sol-gel method using isopropyl aluminum as raw material. The structure and types of the crystals obtained from Al2O3 gel on heating at 400～1000℃ have been investigated by XRD, XPS and IR techniques.

Key words: alumina, transparent ceramic, film, preparation, structure

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