Chinese Journal of Applied Chemistry ›› 2023, Vol. 40 ›› Issue (9): 1330-1333.DOI: 10.19894/j.issn.1000-0518.230181
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URL: http://yyhx.ciac.jl.cn/EN/10.19894/j.issn.1000-0518.230181
http://yyhx.ciac.jl.cn/EN/Y2023/V40/I9/1330
Fig.1 Construction process of industrial chain
Fig.2 Construction of industrial chain about photoresist field
Fig.3 Accurate interconnection process