Abstract:

Six sulfonium PAGs which are used in 248nm photoresists were synthesized in this article, some of them which used phenothioxin as reactant was firstly innovated by our lab. All of the PAGs was identified by IR, HNMR and UV, besides that, we used rhodamine B to evaluate the acid-generation efficiency. We also studied how the solvent effect the acid-generation by fluorescence. The PAGs which were synthesized by thioxanthen-9-one and isopropylthioxanthen-9-one were choosed as the best ones. All the study will be valuable if we apply these novel sulfonium PAGs to 248nm photoresist.

Key words: sulfonium salts, photoacid generator, acid-generation efficiency