Chinese Journal of Applied Chemistry ›› 2017, Vol. 34 ›› Issue (3): 276-281.DOI: 10.11944/j.issn.1000-0518.2017.03.160195

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Effect of the Degree of Chemical Imidization on the Positive Photosensitive Polyimide

ZHU Danyanga,JIN Ruib,WU Zuolina,HAN Baochuna,YANG Zhenghuaa,ZHANG Chunhuaa*()   

  1. aPolymer Composites Engineering Laboratory,Changchun Institute of Applied Chemistry Chinese Academy of Sciences,Changchun 130022,China
    bGlobal Energy Interconnection Research Institue,Beijing 102211,China
  • Received:2016-05-11 Accepted:2016-07-06 Published:2017-02-27 Online:2017-02-27
  • Contact: ZHANG Chunhua
  • Supported by:
    Supported by the Project of the State Grid Corporation:Technology of High Voltage IGBTchip Surface Passivation(No.5455DW150005)

Abstract:

Condensation polymerization of 2,2'-bis(trifluoromethyl)-4,4'-diamino biphenyl(TFDB) and 3,3',4,4'-tetracarboxydiphthalic ether dianhydride(ODPA) gives a soluble polyimide. The effect of the degree of chemical imidization on positive photosensitive polyimide performance was investigated by adjusting the content of α-picoline in the imidization reagent to control the extent of the imide. The results show that the photosensitive polyimide has the best developing performance when the mole ratio of α-picoline to acetic anhydride is 1 to 5 in the process of chemical imidization.

Key words: positive photosensitive polyimide, chemical imidization, solubility, photolithography