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Chinese
Advanced Materials for Lithography
Zi-Li LI, Xing-Ran XU, Jiang-Hao ZHAN, Xiao-Hua HU, Zi-Ying ZHANG, Shi-Sheng XIONG
Chinese Journal of Applied Chemistry . 2022, (
6
): 859 -870 . DOI: 10.19894/j.issn.1000-0518.220031
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