Chinese Journal of Applied Chemistry
Optimization of Development Process for Carbon Dioxide-Based Poly(cyclohexene carbonate) Electron Beam Resist
LU Xin-Yu, MA Bin-Ze, LUO Hao, QI Huan, LI Qiang, WU Guang-Peng
Chinese Journal of Applied Chemistry . 2021, (9): 1189 -1198 .  DOI: 10.19894/j.issn.1000-0518.210149

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