Extreme Ultraviolet Photoresist Inspection Platform in Shanghai Synchrotron Radiation Facility
ZHAO Jun, YANG Shu-Min, XUE Chao-Fan, WU Yan-Qing, CHEN Yi-Fang, TAI Ren-Zhong
Chinese Journal of Applied Chemistry . 2021, (9): 1168 -1174 .  DOI: 10.19894/j.issn.1000-0518.210190