Chinese Journal of Applied Chemistry
Research Progress on High Resolution Extreme Ultraviolet Photoresist
GAO Jia-Xing, CHEN Long, YU Jia-Ting, GUO Xu-Dong, HU Rui, WANG Shuang-Qing, CHEN Jin-Ping, LI Yi, YANG Guo-Qiang
Chinese Journal of Applied Chemistry . 2021, (9): 1138 -1153 .  DOI: 10.19894/j.issn.1000-0518.210221

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