Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

doi:10.11944/j.issn.1000-0518.2018.11.170414

Chinese Journal of Applied Chemistry ›› 2018, Vol. 35 ›› Issue (11): 1364-1371.DOI: 10.11944/j.issn.1000-0518.2018.11.170414

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Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

JIN Xing,KONG Jian,WANG Jingqiang,XING Pengfei(),GAO Bo

School of Materials Science and Engnieering,Northeastern University,Shenyang 110000,China

Received:2017-11-17 Accepted:2018-02-05 Published:2018-10-31 Online:2018-10-31
Contact: XING Pengfei
Supported by:
Supported by the National Basic Research Program(973 Program)(No.51334004)

Abstract

Abstract:

Silicon nitride was prepared through nitriding the diamond-wire cutting waste, which not only recycles the diamond-wire cutting waste but also improves the environment. The influence of HCl and HF on the phase composition, component content and microtopography of nitride products were analyzed by X-ray diffraction(XRD), scanning electron microscopy(SEM) and energy dispersive spectrometer(EDS). The results show that the phases in nitride samples fabricated from the HCl-soaked cutting waste are mainly Si₂N₂O and Si₃N₄. However, the phases in nitride samples fabricated from the HF-soaked cutting waste is mostly Si₃N₄. Si₂N₂O in nitride samples is related to the mass fraction of SiO₂ in cutting waste, and the precondition of producing Si₃N₄ from cutting waste by high temperature nitriding is to reduce the mass fraction of SiO₂ in cutting waste.

Key words: diamond-wire cutting waste, acid leaching, silicon nitride, recycle

JIN Xing,KONG Jian,WANG Jingqiang,XING Pengfei,GAO Bo. Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste[J]. Chinese Journal of Applied Chemistry, 2018, 35(11): 1364-1371.

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Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

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