先进光刻技术:导向自组装
胡晓华, 熊诗圣
Advanced Lithography: Directed Self-Assembly
HU Xiao-Hua, XIONG Shi-Sheng
应用化学 . 2021, (9): 1029 -1078 .  DOI: 10.19894/j.issn.1000-0518.210278