应用化学 ›› 1995, Vol. 0 ›› Issue (1): 77-79.

• 研究论文 • 上一篇    下一篇

α-Fe2O3/SnO2气敏薄膜的结构与性质

娄向东1, 杨秀清1, 李靖华1, 沈荷生2, 沈瑜生2   

  1. 1. 河南师范大学化学系, 新乡 453002;
    2. 中国科学技术大学材料科学与工程系, 合肥
  • 收稿日期:1993-12-31 修回日期:1994-05-16 出版日期:1995-02-10 发布日期:1995-02-10
  • 基金资助:
    国家自然科学基金资助项目

Preparation and Property of α-Fe2O3/SnO2Gas-sensing Film

Lou Xiangdong1, Yang Xiuqing1, Li Jinghua1, Shen Hesheng2, Shen Yusheng2   

  1. 1. Department of Chemistry, Henan Normal University, Xinxiang 453002;
    2. Departnient of Malerials Science and Engineering, University of Science andTechnology of China. Hefei.
  • Received:1993-12-31 Revised:1994-05-16 Published:1995-02-10 Online:1995-02-10

摘要: α-Fe2O3具有刚玉结构,其烧结型敏感元件灵敏度极低.借助于共沉淀及化学气相淀积法等技术,可获得气敏性能较好的元件.本文采用溅射成膜技术,制备了多层结构的气体传感薄膜.

关键词: α-Fe2O3, SnO2, 双层膜, 气敏性能

Abstract: The bilayer film consistetl of α-Fe2O3 and SnO2 was prepared by the sputteringmethod. The film showed a better sensitivity and selectivity than the individual layer alone.The effects of heat treatment conditions and thickness of the α-Fe2O3 layer on the gas-sensingproperty of the product have been studied.

Key words: α-Fe2O3, SnO2, bilayer film, gas-sensing property