Chinese Journal of Applied Chemistry

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氮化铝薄膜的组成分析

许小红a;b;武海顺a;张富强a;张聪杰a;金志浩b   

  1. 陕西师范大学,西安交通大学
  • Received:2009-06-29 Revised:2009-06-29 Published:2001-03-10 Online:2001-03-10
  • Contact: 许小红a;b;武海顺a;张富强a;张聪杰a;金志浩b

Abstract: X射线光电子能谱;氮化铝薄膜的组成分析

CLC Number: