Chinese Journal of Applied Chemistry

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磁控溅射制备择优取向氮化铝薄膜

许小红;武海顺;张聪杰;金志浩   

  1. 陕西师范大学,西安交通大学
  • Received:2009-06-29 Revised:2009-06-29 Published:2000-04-10 Online:2000-04-10
  • Contact: 许小红;武海顺;张聪杰;金志浩

Abstract: AlN薄膜;磁控反应溅射;磁控溅射制备择优取向氮化铝薄膜;晶面取向;X射线衍射

CLC Number: