Abstract: Palladium was deposited in lines on the polyimide substrate from coated palladium acetate under Ar⁺ and He-Ne laser irradiation.The influence of laser power and scan speed on the state of the deposited palladium lines has been examined.The composition of the deposited palladium was analyzed by AES and XPS techniques.The palladium lines showed a good adhesion on the polyimide substrate.

Key words: laser induced deposition, palladium line, polyimide film