Abstract: The results in this paper show that the activation energy of themolysis of PPHFP film is 101.6 kJ·mol^-1 and its half-decomposition temperature is 322℃. The plasma polymerization rate has been investigated under different plasma gas, plasma power and gas pressure in plasma tube. On the experimental results the plot of polymerization rate vs. gas pressure in any position of the reactor was obtained. By elemental analysis and ESCA measurements of the film obtained it is confirmed that N atoms have get into the film through chemical bonding when nitrogen is used as plasma gas.

Key words: Plasma polymerization, Vinyl compounds, Fluorine compounds