Chinese Journal of Applied Chemistry ›› 1983, Vol. 0 ›› Issue (1): 99-102.

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Preparation and Characteristics of indium-tin-oxide (ITO)thin film

Liu Yayan, Han guilin, Wang Lan, Liu Lianyuan   

  1. Changchun Institute of Applied chemistry Academia sinica
  • Received:1982-12-30 Published:1983-12-10 Online:1983-12-10

Abstract: Highly conductive and transparent thin films of indium-tin-oxide(ITO) have been prepared by a simple pyrolitic (spray) method. The conditions of preparation were described. Highly transparent (80-98% transmission) ITO films were obtained with sheet resistances of approximately 2-5Ω/口 for glass substrates and 6Ω/口 for borosilicate glass substrates.