先进光刻材料
李自力, 徐兴冉, 湛江浩, 胡晓华, 张子英, 熊诗圣
Advanced Materials for Lithography
Zi-Li LI, Xing-Ran XU, Jiang-Hao ZHAN, Xiao-Hua HU, Zi-Ying ZHANG, Shi-Sheng XIONG
应用化学 . 2022, (6): 859 -870 .  DOI: 10.19894/j.issn.1000-0518.220031