胍基硅前驱体的合成及应用
马潇, 许从应, 许东升, 丁玉强, 金成刚, 季佩宇
Synthesis and Application of Guanidinato Silicon Precursors
MA Xiao, XU Chongying, XU Dongsheng, DING Yuqiang, JIN Chenggang, JI Peiyu
应用化学
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2019, (10): 1179
-1185
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DOI: 10.11944/j.issn.1000-0518.2019.10.190050
