晶体硅金刚线切割废料制备高纯氮化硅
金星,孔剑,王敬强,邢鹏飞,高波
Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste
JIN Xing,KONG Jian,WANG Jingqiang,XING Pengfei,GAO Bo
应用化学 . 2018, (11): 1364 -1371 .  DOI: 10.11944/j.issn.1000-0518.2018.11.170414