聚酰亚胺上激光诱导直接镀钯

摘要/Abstract

摘要： 利用激光的热效应使聚酰亚胺上的醋酸钯膜分解,得到直接镀覆的金属铝线,讨论了激光波长、扫描速率等因素对钯沉积层的影响,并对该沉积层进行了分析测试。

Abstract: Palladium was deposited in lines on the polyimide substrate from coated palladium acetate under Ar⁺ and He-Ne laser irradiation.The influence of laser power and scan speed on the state of the deposited palladium lines has been examined.The composition of the deposited palladium was analyzed by AES and XPS techniques.The palladium lines showed a good adhesion on the polyimide substrate.

Key words: laser induced deposition, palladium line, polyimide film

曾鑫, 汪亚妹, 郁祖湛. 聚酰亚胺上激光诱导直接镀钯[J]. 应用化学, 1994, 0(5): 18-21.

Zeng Xin, Wang Yamei, Yu Zuzhan. Laser Induced Palladium Deposition on Polyimide[J]. Chinese Journal of Applied Chemistry, 1994, 0(5): 18-21.

[1]	崔启明, 江志裕, 郁祖湛, 应质峰. p-Si上激光诱导局部沉积铂[J]. 应用化学, 1998, 0(4): 104-106.
[2]	姜贵凤, 郁祖湛. 不同化学镀液中p－Si上激光诱导局部沉积铜[J]. 应用化学, 1996, 0(2): 18-21.

聚酰亚胺上激光诱导直接镀钯

Laser Induced Palladium Deposition on Polyimide

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