聚醚胺表面活性剂在铜阻挡层抛光中的应用

刘琳, 何华锋

Application of Polyether Amines in Copper Barrier Chemical Mechanical Polishing Slurry

Lin LIU, Hua-Feng HE

图5 聚醚二胺对图形化晶圆边缘过度侵蚀缺陷影响

Fig.5 Effect of polyether diamine on the EOE defect of patterned wafers