晶体硅金刚线切割废料制备高纯氮化硅
, 高波 Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste
JIN Xing, KONG Jian, WANG Jingqiang, XING Pengfei, GAO Bo
, GAO Bo 氮化产物中各物相的质量分数
晶体硅金刚线切割废料制备高纯氮化硅 |
|
金星, 孔剑, 王敬强, 邢鹏飞, 高波 |
Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste |
|
JIN Xing, KONG Jian, WANG Jingqiang, XING Pengfei
, GAO Bo |
氮化产物中各物相的质量分数 |
| |